KLA
FT 750
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What is it?
What do the numbers mean?
Gas & chemistry2
Control & software1
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement technology does the FT 750 use?
The FT 750 uses visible-light spectrophotometer technology.[2]
Which processes does the FT 750 support?
The FT 750 is used for CVD, etch, lithography, diffusion, and other processes.[2]
What film-related effects do the FT 750 algorithms account for?
The FT 750 algorithms account for film dispersion, underlying film thickness, and differing numerical apertures.[2]
What does the FT 750 help determine for photoresist?
The FT 750 automatically determines the contrast and sensitivity of virtually any photoresist.[2]
Not publicly documented
The following facts about the FT 750 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FT 750 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FT 750 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FT 750 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FT 750 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FT 750 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]web.archive.org — tencor.com (Apr 22, 1999)web.archive.org
Last updated Oct 11, 2026.
Compare with similar tools
View all →Brooks 017-0146-01 is a prealigner manufactured by Brooks.
The EVG 101 is an advanced resist processing system for spin or spray coating and developing of wafers up to 300 mm.
