Lam Research
SEZ RST 201 Spin
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam / SEZ RST 201 Spin is a spin etcher used for wet etching of 6-inch wafers. The Lam / SEZ RST 201 Spin was manufactured in 1997.[1]
What is it?
What do the numbers mean?
Wafer handling1
Configuration & options2
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of processor is the SEZ RST 201?
The SEZ RST 201 is a single-wafer wet chemical processor, also known as a spin etcher.[1][2]
How many process chambers does the SEZ RST 201 have?
The SEZ RST 201 has a single process chamber.[2]
How many load ports does the SEZ RST 201 have?
The SEZ RST 201 is equipped with two open-cassette load ports.[2]
Not publicly documented
The following facts about the SEZ RST 201 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ RST 201 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SEZ RST 201 Spin are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SEZ RST 201 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEZ RST 201 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEZ RST 201 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
- [2]https://www.ptwsingapore.com/img/products/SEZRST201/SEZ%20RST201%20Datasheet%20(SN%200162).pdf — ptwsingapore.comptwsingapore.com
Last updated Sep 24, 2026.
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