400-series

The Laurell WS-400-6NPP is a 400-series spin coater, a tabletop spin processor used for depositing thin liquid films onto substrates by centrifugal force. The system is offered as a manual tabletop unit and is capable of processing wafers up to 150 mm in diameter and 4" × 4" substrates.^[1][2][3]

The WS-400-6NPP uses a 400-series process controller that can store and automatically run process recipes consisting of run time and acceleration rate, or it can be operated manually. The controller features a back-lit display and membrane keypad, and it can store up to 20 programs with up to 51 steps per program. Each step includes a time (from 0.1 seconds to 99 minutes 59.9 seconds), a speed, and an acceleration or deceleration rate.^[1][2][3][4]

The substrate is held on a vacuum chuck; the standard chuck has a 1.75" (45 mm) diameter and is supplied with a fragment adapter that covers substrates from 10 mm through 150 mm SEMI wafers. A proprietary labyrinth seal protects the motor and control electronics from chemical contamination and provides a nitrogen purge to the process chamber.^[1][2][3]

Safety interlocks prevent rotation when the vacuum hold-down force is insufficient (vacuum interlock) and when the lid is open (lid interlock). A process safeguard feature prevents the same process from being inadvertently run again on the same substrate, though it can be bypassed to allow repeated runs or looping sequences.^[1][2][3][4]