Nikon
NSR S 207 D
What it is
General reference — not yet source-verifiedThe Nikon NSR S 207 D is a stepper used in semiconductor photolithography. Steppers are exposure tools that project a pattern from a reticle onto a photoresist-coated wafer using a step-and-repeat process. The NSR S 207 D belongs to the Nikon NSR series of lithography systems.
How it works
General reference — not yet source-verifiedThe NSR S 207 D operates by illuminating a reticle with a light source and projecting a reduced image of the reticle pattern onto a wafer. The wafer is moved on a precision stage to expose each die site sequentially, and alignment systems overlay each exposure to previous layers.
The system uses an excimer laser as its light source, typical for deep ultraviolet lithography. A reduction lens system demagnifies the reticle pattern to achieve the required critical dimensions.
Where it fits in the process flow
General reference — not yet source-verifiedIn the semiconductor manufacturing process, the NSR S 207 D is used in the photolithography module. The stepper receives wafers that have been coated with photoresist and, after exposure, the wafers proceed to develop and etch steps. Steppers are employed for patterning multiple layers of integrated circuits.
What do the numbers mean?
Optics & imaging9
Configuration & options7
- Machine only[4]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSR S 207 D with Cymer laser | — | 2005 | Listed as a Nikon NSR S 207 D stepper with Cymer laser. | Equipment inventory listing[1] |
| NSR S 207 D with Gigaphoton laser | — | 2005 | Listed as a Nikon NSR S 207 D stepper with Gigaphoton laser. | Equipment inventory listing[2] |
| NSR S 207 D with G41K2 Gigaphoton laser | — | 2004 | Listed as a Nikon NSR S 207 D stepper with G41K2 Gigaphoton laser. | Equipment inventory listing[3] |
| NSR S 207 D machine only | — | — | Listed as the Nikon NSR S 207 D stepper machine only. | Equipment inventory listing[4] |
| Nikon NSR S 207 D with Cymer laser | — | 2005–2005 | Configured with a Cymer laser. | Equipment inventory listing[1] |
| Nikon NSR S 207 D with Gigaphoton laser | — | 2005–2005 | Configured with a Gigaphoton laser. | Equipment inventory listing[2] |
| Nikon NSR S 207 D with Gigaphoton laser (second unit) | — | 2005–2005 | Configured with a Gigaphoton laser. | Equipment inventory listing[5] |
| Nikon NSR S 207 D with G41K2 Gigaphoton laser | — | 2004–2004 | Configured with a G41K2 Gigaphoton laser. | Equipment inventory listing[3] |
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the NSR S 207 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 207 D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSR S 207 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR S 207 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSR S 207 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR S 207 D are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]inventory listing
- [5]Equipment inventory listing
Last updated Sep 30, 2026.
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