Waferpedia

Nissin

Exceed 3000 AH

Ion ImplantationNissin Exceed 3000 AH family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

NissinExceed 3000 AH
No photo available yet

What it is

The Nissin Exceed 3000 AH is an ion implantation tool for semiconductor manufacturing.[2]

The Nissin Exceed 3000 AH is a medium-current ion implanter.[3][5][2]

How it works

The EXCEED3000AH series uses a transport system that handles thin wafers and other substrates, a horizontal and vertical beam-angle feedback system, and a multiple Faraday cup system.[3][6]

Where it fits in the process flow

General reference — not yet source-verified

Ion implantation is a front-end semiconductor process step used before later thermal processing that activates dopants and repairs lattice damage.

Medium-current systems are generally used when device-region doping requires controlled dose placement and repeatability.

Applications

The Nissin Exceed 3000 AH is used for semiconductor doping.[2]

What do the numbers mean?

Wafer handling2

Wafer size
6-inch wafers[2]
Accurate?
Transport system
handles thin wafers and other various substrates[3]
Accurate?

Configuration & options5

Medium current[1]
Accurate?
Type
medium current ion implanter[2]
Accurate?
Process mode
nanometer-scale process modes[3]
Accurate?
Average autotune time
less than 2 minutes[3]
Accurate?
Beam angle feedback
horizontal and vertical beam angle feedback system with multiple Faraday cup system[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
EXCEED3000AH-8C——described as a new 200mm tool; associated with improved throughput for 8 inch wafer fabricationsnccavs-usergroups.avs.org[4]
Interested in this tool?
Need help with this tool?Embed spec card

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What type of implanter is the Nissin Exceed 3000 AH?

The Nissin Exceed 3000 AH is a medium-current ion implanter.[5][2]

What is the model designation?

The model designation is Nissin Exceed 3000 AH.[5][2]

Not publicly documented

The following facts about the Exceed 3000 AH are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Exceed 3000 AH are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Exceed 3000 AH are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Exceed 3000 AH are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Exceed 3000 AH is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Exceed 3000 AH are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]nissin-ion.co.jp — nissin-ion.co.jpnissin-ion.co.jp
  4. [4]nccavs-usergroups.avs.org — nccavs-usergroups.avs.orgnccavs-usergroups.avs.org
  5. [5]Exceed 3000 AH — Nissin | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  6. [6]EXCEED3000AHシリーズ - 日新イオン機器株式会社 — nissin-ion.co.jpnissin-ion.co.jp
Was this page accurate?

Last updated Oct 11, 2026.

Compare with similar tools

View all →