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Nitto

MSA 840 Wafer Mounter

Nitto MSA 840 Wafer Mounter family
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The Nitto MSA 840 is a semi-automatic wafer mounter designed for dicing processes. The Nitto MSA 840 handles wafers from 4 to 8 inches using a non-contact chuck method. The operator manually places the wafer and frame, and the system automatically feeds, applies, cuts, and removes the tape.[1]

NittoMSA 840 Wafer Mounter
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Power

Single-Phase AC100V[2]

Vacuum

0.3-0.5 MPa[2]

What it is

The Nitto MSA 840 is a semi-automatic wafer mounter designed for the dicing process in semiconductor packaging. The machine is manufactured by Nitto Denko. The MSA 840 is a semi-automatic type that requires the operator to manually place the wafer and frame, after which tape applying, cutting, and waste tape removal are performed automatically. The MSA 840 can be converted to full automatic operation with the addition of a wafer and frame handling tool.[1][3]

How it works

Wafer mounters apply a dicing tape to the back side of a wafer and mount the wafer on a dicing frame. The MSA 840 performs the tape applying, cutting, and waste tape removal operations automatically. The machine uses a non-contact chuck method that contacts three to four millimeters of the wafer edge, though a contact chuck method is also applicable. The system includes one fan type and two brush type ionizers for static elimination. Taping speed control is variable by manual setting, and taping tension can be set to high/low auto changing with tape diameter or variable by manual setting. The machine is equipped with a cutting diameter detection sensor and a cutting miss detection function.[1]

The MSA 840 features a 3.8 inch touch panel for user interface. The primary work holding system uses vacuuming. The wafer table is of a non-contact type. A tape remaining detecting sensor is equipped, and a cut number counter is included. The machine provides a 'No wafer operation' mode, which allows tape applying on a dicing frame without a wafer. The number of cuts and taping tension parameters can be set through the touch panel and embedded in a recipe.[1]

What do the numbers mean?

Power & electrical1

Power supply
Single-Phase AC100V[2]
Accurate?

Vacuum & pumping2

Air pressure
0.3-0.5 MPa[2]
Accurate?
Work holding system
By vacuuming[1]
Accurate?

Wafer handling8

Applicable wafer size
4", 5", 6", 8"[1]
Accurate?
Throughput (approx.)
30 sec/wafer (excluding wafer and frame setting time and wafer mount frame removing time)[1]
Accurate?
Throughput (approx.)
40 seconds/wafer[2]
Accurate?
Applicable wafer thickness (Contact Table)
200 µm or more[2]
Accurate?
Applicable wafer thickness (Non-Contact Table)
250 µm or more[2]
Accurate?
No wafer operation
Tape applying on dicing frame without wafer[1]
Accurate?
Wafer table
Non contact table available[1]
Accurate?
Type
Semi automatic type to set wafer and frame manually and to do tape applying, cutting and removing waste tape automatically[1]
Accurate?

Control & software1

Taping speed control
Variable by manual setting[1]
Accurate?

Dimensions & facilities3

Dimensions (W x D x H)
800 x 670 x 750 mm[1]
Accurate?
Dimensions (W x D x H)
815 x 970 x 600 mm[2]
Accurate?
Weight
approx. 135 kgf[1]
Accurate?

Configuration & options8

Applicable frame size
for 6", for 8"[1]
Accurate?
Static eliminator
1 Fan type & 2 brush type[1]
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Taping tension
H/L auto changing with tape Dia. H/L Variable by manual setting[1]
Accurate?
Cut number counter
Equipped[1]
Accurate?
Cutting dia. detection
Available[1]
Accurate?
Cutting miss detection
Available[1]
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Optional function
Magnetic holder can be added in case of using high adhesive tape[1]
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Touch Panel
3.8 inch[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
MSA840-II——Brochure designates NEL-MSA840-II; no explicit differences from base MSA840 documented.semicorp.com[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Power supplySingle-Phase AC100V[2]
  • Air pressure0.3-0.5 MPa[2]
  • Work holding systemBy vacuuming[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the throughput of the MSA 840?

The throughput is approximately thirty seconds per wafer, excluding wafer and frame setting time and wafer mount frame removing time.[1]

What are the applicable wafer thicknesses for the MSA 840?

The applicable wafer thickness is two hundred micrometers or more for the contact table, and two hundred fifty micrometers or more for the non-contact table.[2]

How does the MSA 840 handle the tape?

The system automatically feeds the tape, applies it to the frame and wafer, trims the tape, and removes the waste tape.[3]

Not publicly documented

The following facts about the MSA 840 Wafer Mounter are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MSA 840 Wafer Mounter are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the MSA 840 Wafer Mounter are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MSA 840 Wafer Mounter are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MSA 840 Wafer Mounter is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MSA 840 Wafer Mounter are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]semicorp.com — semicorp.comsemicorp.com
  2. [2]wotol.com — wotol.comwotol.com
  3. [3]MSA840-II Nitto Denko – Semiconductor Equipment Corporation — semicorp.comsemicorp.com
  4. [4]Equipment inventory listing
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Last updated Sep 27, 2026.

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