Waferpedia

OAI

806 MBA Mask

LithographyOAI 806 MBA Mask family
Research Quality: 20% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

OAI806 MBA Mask
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What is it?

The OAI 806 MBA Mask Aligner is a mask aligner used in semiconductor lithography.

What do the numbers mean?

Wafer handling3

Wafer size
4 inch[1]
Accurate?
Wafer size
150 mm[2]
Accurate?
Included chuck sizes
3 inch, 4 inch, 6 inch BSA chucks; 4 inch, 5 inch, 7 inch mask holders[3]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What mask sizes does the system accommodate?

The OAI 806 MBA can use mask holders for 4 inch (with a 3 inch round opening), 5 inch (with a 4 inch round opening), and 7 inch (with a 6 inch round opening) masks.[3]

Not publicly documented

The following facts about the 806 MBA Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 806 MBA Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 806 MBA Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 806 MBA Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 806 MBA Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 806 MBA Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]tarasemi.com — tarasemi.comtarasemi.com
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Last updated Sep 29, 2026.

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