Pfeiffer

A turbopump power and control unit is the electronic subsystem that supplies electrical power to a turbopump's motor and manages its operation. Such a unit converts mains power into the drive power required by the pump rotor. The unit also provides control functions for starting, running, and stopping the attached pump.
Turbopump drive units typically contain a power conversion stage and a motor controller. The controller regulates the rotational speed of the pump rotor through its operating range. The unit monitors the pump's operational state and can interface with the vacuum system's control infrastructure.
Turbopumps are used to generate high and ultra-high vacuum in process chambers. A turbopump is backed by a roughing pump that removes gas at higher pressures. The power and control unit drives the turbopump and forms part of the vacuum system's support infrastructure. Such systems are found in semiconductor fabrication and analytical instrument environments.
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The following facts about the DCU 310 Turbopump Power & Control are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
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Last updated Oct 5, 2026.
The Applied Materials 0010-13627 is a high efficiency RF match designed for semiconductor equipment.