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SCREEN

SU 2000

Etch6"SCREEN SU 2000 family
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The SCREEN / DNS SU 2000 is a single-wafer spray wet etcher. The SU 2000 supports 6-inch and 8-inch wafers. The SU 2000 is available as a spray acid tool or a spray solvent tool.[1][2][3]

SCREENSU 2000
No photo available yet

Wafer size

6"

Gas delivery

NH4F:HF, HF:HNO3, PAN, SC-1, DHF[3]

What it is

General reference — not yet source-verified

The SCREEN / DNS SU 2000 is a wet etch tool used in semiconductor manufacturing. Wet etchers remove material from a wafer surface using liquid chemical etchants. The SU 2000 is a single-wafer spray tool, processing one wafer at a time.

What do the numbers mean?

Wafer handling4

Wafer size
Wafer currently configured for 6"[1]
Accurate?
Application
Single wafer spray solvent tool[1]
Accurate?
Application
Single wafer spray acid tool[2]
Accurate?
Wafer Size
6 inch, 8 inch[1]
Accurate?

Gas & chemistry6

Chemicals Used
Stripper, Qz, ST (also used for NMP in place of one)[1]
Accurate?
Chemicals Used
BOE, 1% DHF, 49% HF or HF / HNO3, SPM, SC-1, SC-2[2]
Accurate?
Chemicals Used
NH4F:HF, HF:HNO3, PAN, SC-1, DHF[3]
Accurate?
Chemicals
Stripper, Qz, ST, NMP[1]
Accurate?
Chemicals
BOE, 1% DHF, 49% HF or HF/HNO3, SPM, SC-1, SC-2[2]
Accurate?
Chemicals
NH4F:HF, HF:HNO3, PAN, SC-1, DHF[3]
Accurate?

Configuration & options5

Under OEM Maintenance[1]
Accurate?
Station List
Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[1]
Accurate?
Sation List
Lp, MPC1, MPC2, MPC3, MPC4, Reverser Unit, CR, PF, I/F (N2/air)[2]
Accurate?
Station List
LP, MPC1, MPC2, MPC4, Reverser Unit, CR, PF[3]
Accurate?
Vintage
2017[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Chemicals UsedStripper, Qz, ST (also used for NMP in place of one)[1]
  • Chemicals UsedBOE, 1% DHF, 49% HF or HF / HNO3, SPM, SC-1, SC-2[2]
  • Chemicals UsedNH4F:HF, HF:HNO3, PAN, SC-1, DHF[3]
  • ChemicalsStripper, Qz, ST, NMP[1]
  • ChemicalsBOE, 1% DHF, 49% HF or HF/HNO3, SPM, SC-1, SC-2[2]
  • ChemicalsNH4F:HF, HF:HNO3, PAN, SC-1, DHF[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What chemicals can be used in the SU 2000 configured as a solvent tool?

In a solvent configuration, chemicals used include Stripper, Qz, ST, and optionally NMP in place of one of the others.[1]

Does the SU 2000 process wafers one at a time?

Yes, the SU 2000 is a single-wafer spray tool.[1][2]

Not publicly documented

The following facts about the SU 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SU 2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SU 2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SU 2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SU 2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
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Last updated Sep 29, 2026.

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