Semitool
Scepter SCE A 311
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Semitool Scepter SCE A 311 (also designated SCE-A-311) is a wet etcher (acid spray) for 200 mm wafers, manufactured in 2001. The Semitool Scepter SCE-A-311 uses software revision SAAB 3.1.[1][2]
What it is
How it works
General reference — not yet source-verifiedIn a spray etcher, the wafer is held on a spinning chuck while a chemical etchant is sprayed onto the front surface through one or more nozzles. The rotation of the wafer ensures uniform distribution of the chemical and helps to maintain consistent etch rates across the wafer. The tool typically includes chemical delivery systems, exhaust handling for fumes, and a rinse/dry cycle to remove residual chemicals after etching.
What do the numbers mean?
Wafer handling2
Control & software1
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scepter SCE A 311 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scepter SCE A 311 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Scepter SCE A 311 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scepter SCE A 311 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scepter SCE A 311 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scepter SCE A 311 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]fabsurplus.com — fabsurplus.comfabsurplus.com
- [2]solutions-on-silicon.com — solutions-on-silicon.comsolutions-on-silicon.com
- [3]Inventory photo
Last updated Oct 7, 2026.
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