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SUSS MicroTec

MA 4 6 Mask

LithographySUSS MicroTec MA 4 6 Mask family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

MA 4 6 Mask — Inventory photo
Fig. 01MA 4 6 MaskInventory photo[1]

What is it?

Applications

The equipment is a mask aligner used for lithography.[1]

What do the numbers mean?

Power & electrical2

Voltage
220 V[1]
Accurate?
50/60 Hz[1]
Accurate?

Configuration & options1

500 VA[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
MA 4 / 6———Equipment inventory listing[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage220 V[1]
  • Configuration50/60 Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the MA 4 6 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MA 4 6 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the MA 4 6 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the MA 4 6 Mask are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the MA 4 6 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MA 4 6 Mask are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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