Waferpedia

Takatori

MWS 610 SD

Dicing & GrindingTakatori MWS 610 family
Research Quality: 50% complete

The Takatori MWS 610 SD is a wire saw used for dicing semiconductor materials. The Takatori MWS 610 SD features a high rocking angle of ±3°, a 24-gallon slurry supply tank with pump and agitator, and load cell electronic control.[1][2][3][4][5]

MWS 610 SD — Inventory photo
Fig. 01MWS 610 SDInventory photo[1]

Vacuum

24 gal with pump and agitator[1]

Gas delivery

Slurry temperature controller[1]

What it is

The Takatori MWS 610 SD is a wire saw used for semiconductor material processing.[1][2][3][4][5]

How it works

The Takatori MWS 610 SD has a slurry supply tank with pump and agitator, a slurry temperature controller, a slurry flow meter control system, a spindle axis temperature controller, a high rocking angle of plus or minus three degrees, a disposable reel adapter, and load cell electronic control.[1][2][3][4][5]

Where it fits in the process flow

General reference — not yet source-verified

A wire saw sits in the material removal portion of semiconductor processing, where it supports separation and shaping operations before later device fabrication steps.

The Takatori MWS 610 SD is a downstream cutting and shaping tool rather than a wafer fabrication exposure tool.

Applications

General reference — not yet source-verified

Wire saws are used for slicing and shaping semiconductor materials that require controlled mechanical removal.

The Takatori MWS 610 SD is used in dicing and grinding contexts.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • HDD included but completely wiped
  • No software for operation

What do the numbers mean?

Vacuum & pumping2

Slurry supply tank with pump and agitator: 24 gal[1]
Accurate?
Slurry supply tank
24 gal with pump and agitator[1]
Accurate?

Gas & chemistry8

Slurry temperature controller[1]
Accurate?
Slurry flow meter control system[1]
Accurate?
Slurry supply tank capacity
24 gallons[1]
Accurate?
Slurry supply tank capacity
24 gal[1]
Accurate?
Slurry temperature controller
Present[1]
Accurate?
Slurry flow meter control system
Present[1]
Accurate?
Slurry temperature controller
Included[1]
Accurate?
Slurry flow meter control system
Included[1]
Accurate?

Control & software10

Spindle axis temperature controller[1]
Accurate?
Load cell electronic control[1]
Accurate?
HDD Included (but completely wiped) without software for operation[1]
Accurate?
Electric control cabinet[3]
Accurate?
Spindle axis temperature controller
Present[1]
Accurate?
Load cell electronic control
Present[1]
Accurate?
Electric control cabinet
Present[3]
Accurate?
Spindle axis temperature controller
Included[1]
Accurate?
Load cell electronic control
Included[1]
Accurate?
HDD
Included, completely wiped, without software for operation[1]
Accurate?

Configuration & options21

Operating Hours
35076[1]
Accurate?
High rocking angle
± 3°[1]
Accurate?
Disposable reel adapter[1]
Accurate?
Operating Hours
35549[2]
Accurate?
Operating Hours
36028[3]
Accurate?
Power transformer[3]
Accurate?
Rocking bearing system[3]
Accurate?
Ball screw system for work table[3]
Accurate?
Operating Hours
39072[4]
Accurate?
Operating Hours
38357[5]
Accurate?
Operating Hours
41578[6]
Accurate?
Operating Hours
35076 (source 1), 35549 (source 2), 36028 (source 3), 39072 (source 4), 38357 (source 5)[1]
Accurate?
Rocking angle
±3°[1]
Accurate?
Vintage year
2017[1]
Accurate?
Disposable reel adapter
Present[1]
Accurate?
Power transformer
Present[3]
Accurate?
Rocking bearing system
Present[3]
Accurate?
Ball screw system for work table
Present[3]
Accurate?
Vintage
2017[1]
Accurate?
Machine type
Wire saw[1]
Accurate?
Disposable reel adapter
Included[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationSlurry supply tank with pump and agitator: 24 gal[1]
  • ConfigurationSlurry temperature controller[1]
  • ConfigurationSlurry flow meter control system[1]
  • Slurry supply tank capacity24 gallons[1]
  • Slurry supply tank capacity24 gal[1]
  • Slurry temperature controllerPresent[1]
  • Slurry flow meter control systemPresent[1]
  • Slurry supply tank24 gal with pump and agitator[1]
  • Slurry temperature controllerIncluded[1]
  • Slurry flow meter control systemIncluded[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What is the maximum rocking angle of the MWS 610 SD?

The maximum rocking angle is ±3°.[1][2][3][4][5]

Does the MWS 610 SD include a slurry temperature controller?

Yes, the machine includes a slurry temperature controller.[1][2][3][4][5]

Does the MWS 610 SD have load cell electronic control?

Yes, the machine has load cell electronic control.[1][2][3][4][5]

Not publicly documented

The following facts about the MWS 610 SD are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MWS 610 SD are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the MWS 610 SD are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the MWS 610 SD are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the MWS 610 SD is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the MWS 610 SD are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]inventory listing
  3. [3]Inventory photo
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
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Last updated Oct 11, 2026.

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