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Ultratech

Titan 4700

LithographyUltratech Titan 4700 family
Research Quality: 30% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Ultratech Titan 4700 is a stepper used in semiconductor lithography. The Titan 4700 uses G and H line optics and a 1000W lamp. The Titan 4700 supports wafer sizes from 4 to 8 inches.[1][2][3]

UltratechTitan 4700
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Gas delivery

Yes (for thick resist exposure)[2]

Optics

G and H line[2]

What it is

The Ultratech Titan 4700 is a stepper used in photolithography, a class of semiconductor equipment that projects a reticle image onto a photoresist-coated wafer to define circuit patterns. The Titan 4700 supports wafer sizes of 4 inch, 5 inch, 6 inch, and 8 inch. The tool is equipped with G-line and H-line optics.[2][3][1]

What do the numbers mean?

Wafer handling2

Wafer Sizes Supported
4 inch, 5 inch, 6 inch, 8 inch[2]
Accurate?
Robot
Genmark[2]
Accurate?

Gas & chemistry1

Extended Focus Option
Yes (for thick resist exposure)[2]
Accurate?

Optics & imaging5

Optics
G and H line[2]
Accurate?
Reticle Size
5 inch (upgradable to 6 inch)[2]
Accurate?
Numerical Aperture
0.32[2]
Accurate?
Reticle Bar Code Reader
Yes[2]
Accurate?
Auto Aperture
For 2 or 3 field reticles[3]
Accurate?

Configuration & options3

Lamp Power
1000 W[2]
Accurate?
Maximum Field of View
44 mm x 26.7 mm[2]
Accurate?
Machine Vision System
Cognex[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Extended Focus OptionYes (for thick resist exposure)[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the Titan 4700 support?

The Titan 4700 supports 4 inch, 5 inch, 6 inch, and 8 inch wafers.[2][3][1]

What is the numerical aperture of the Titan 4700?

The numerical aperture of the Titan 4700 is 0.32.[2][3]

What type of illumination source does the Titan 4700 use?

The Titan 4700 uses a 1000 watt lamp.[2][3]

Does the Titan 4700 have an option for thick resist exposure?

Yes, the Titan 4700 includes an Extended Focus option for thick resist exposure capability.[2][3]

Not publicly documented

The following facts about the Titan 4700 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Titan 4700 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Titan 4700 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Titan 4700 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Titan 4700 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Titan 4700 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]classoneequipment.com — classoneequipment.comclassoneequipment.com
  3. [3]classoneequipment.com — classoneequipment.comclassoneequipment.com
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Last updated Sep 24, 2026.

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