Veeco
RF 350
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Veeco RF 350 Ion Beam is a high-precision, automated, single-substrate loadlocked production system designed for ion beam etching (IBE) and Reactive Ion Beam Etching (RIBE). The RF 350 uses a 300mm diameter, inductively coupled, filamentless RF ion source that provides highly collimated beams. The RF 350 handles single 6-inch (150 mm) wafers.[1]
What it is
The Veeco RF 350 is an ion beam etching system used in semiconductor manufacturing.[1]
The RF 350 is a high-precision, automated, single-substrate loadlocked production system designed for ion beam etching (IBE) and reactive ion beam etching (RIBE).[1]
The system uses a 300 mm diameter inductively coupled filamentless RF ion source and accepts single six-inch wafers.[1]
How it works
The Veeco RF 350 generates its ion beam using an inductively coupled filamentless RF ion source, producing a collimated beam for etching.[1]
Where it fits in the process flow
General reference — not yet source-verifiedIon beam etch tools are placed in the dry etch portion of the semiconductor process flow.
The RF 350 is used after pattern definition to transfer a pattern into the underlying film through directional etching.
Applications
The Veeco RF 350 is used for ion beam etching and reactive ion beam etching in applications such as MEMS fabrication, semiconductor device production, and data storage device manufacturing.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing parts
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Ion source typeinductively coupled, filamentless RF ion source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Veeco RF 350?
It is an etcher made by Veeco.[2]
Not publicly documented
The following facts about the RF 350 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the RF 350 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the RF 350 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the RF 350 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the RF 350 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the RF 350 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]Inventory photo
Last updated Oct 10, 2026.
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