CEE
300 Bake Plate alternatives
Comparable Thermal / Diffusion equipment documented in the Waferpedia catalog.
6 comparable tools
YES
12-2P-CP
300mm
Thermal / Diffusion
The YES 12-2P-CP is a manual-load high-temperature cure oven for MEMS and semiconductor process applications.
YES
450 PB 12 Polyimide
300mm
Thermal / Diffusion
The Yes 450 PB 12 Polyimide Bake Oven is a batch process bake oven with capacity for two 25-wafer cassettes and 300mm FOUPs.
YES
58TA
300mm
Thermal / Diffusion
The YES-58TA is a vacuum bake, HMDS vapor prime, and image reversal system that uses NH3 vapor for image reversal processing.
SUSS MicroTec
ACS 300 Gen 2
300mm
Thermal / Diffusion
The SUSS ACS 300 Gen 2 is a coater/developer system.
Despatch
AST-1100
300mm
Thermal / Diffusion
YES
PB12
300mm
Thermal / Diffusion
The YES PB12 is a PB-HV Series manual-load high vacuum oven, stated to support up to 300 mm wafers and to be designed for MEMS and semiconductor process applications.
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