Waferpedia

CEE

300 Bake Plate

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

300 Bake Plate — Inventory photo
Fig. 01300 Bake PlateInventory photo[1]

Wafer size

300mm

Power

208V[1]

Vacuum

2" (50.8mm) OD[3]

Performance

±0.3% across working area[2]

Optics

0.1°C[2]

Where it fits in the process flow

The CEE 300 Bake Plate can be integrated into the X-Pro II Workstation, allowing combination with spin coaters and developers to form a complete process station for automated wafer processing.[4][2]

What do the numbers mean?

Power & electrical3

Voltage
208V[1]
Accurate?
Voltage
208-240 VAC[3]
Accurate?
Power
3100-4100 watts[3]
Accurate?

Vacuum & pumping1

Exhaust Port
2" (50.8mm) OD[3]
Accurate?

Wafer handling3

Wafer size
up to 300mm wafer[1]
Accurate?
Max Substrate Size
300mm round or 12" x 12" square[2]
Accurate?
Min Substrate Size
4 inch round[2]
Accurate?

Optics & imaging1

Temperature Resolution
0.1°C[2]
Accurate?

Performance1

Temperature Uniformity
±0.3% across working area[2]
Accurate?

Control & software1

Software
Internal OS[1]
Accurate?

Dimensions & facilities3

Smart Pin Height Range
0-19 mm[2]
Accurate?
Weight (machine only)
146 lb (66.2 kg)[3]
Accurate?
Dimensions
18" H x 18.75" W x 26.25" D[3]
Accurate?

Configuration & options1

Max Temperature
300°C (400°C optional)[2]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Apogee Benchtop 300 Bake Plate——Benchtop configurationcosteffectiveequipment.com[2]
Apogee Flange Mount 300 Bake Plate——Flange/deck-mountable configurationcosteffectiveequipment.com[2]
Apogee X-Pro 300 Bake Plate——X-Pro platform for use with X-Pro II Workstationcosteffectiveequipment.com[2]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage208V[1]
  • Voltage208-240 VAC[3]
  • Power3100-4100 watts[3]
  • Exhaust Port2" (50.8mm) OD[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What temperature range does the CEE 300 Bake Plate support?

The standard temperature range is ambient to 300°C, with an optional upgrade to 400°C.[2][3]

What bake methods are available?

The plate supports three automated bake methods: contact, vacuum, and proximity.[2][3]

What user interface does the CEE 300 have?

The bake plate features a 7-inch full-color touchscreen with DataStream OS for recipe creation, monitoring, and logging.[2]

Not publicly documented

The following facts about the 300 Bake Plate are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 300 Bake Plate are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 300 Bake Plate are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 300 Bake Plate are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 300 Bake Plate is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 300 Bake Plate are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]costeffectiveequipment.com — costeffectiveequipment.comcosteffectiveequipment.com
  3. [3]sistemtechnology.com — sistemtechnology.comsistemtechnology.com
  4. [4]Cost Effective Equipment | Apogee 300 Bake Plate | SiSTEM — sistemtechnology.comsistemtechnology.com
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Last updated Sep 25, 2026.

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