Tegal
915
The Tegal 915 is a plasma barrel etcher. The Tegal 915 processes six cassettes of 100 mm wafers and four cassettes of 125 mm and 150 mm wafers. The Tegal 915 is used for photoresist strip and descum.[1][2]
What it is
How it works
Where it fits in the process flow
The Tegal 915 is used for batch processing rather than single-wafer handling, which suits high-throughput strip and descum work.[1]
Applications
Typical applications for the Tegal 915 include photoresist strip and descum.[1][2]
The Tegal 915 batch capacity includes six cassettes of 100 mm wafers and four cassettes of 125 mm and 150 mm wafers.[1][2]
- photoresist strip
- descum
What do the numbers mean?
Wafer handling2
- Batch capacity
- Six cassettes of 100 mm wafers (150 pcs.) and four cassettes of 125 mm and 150 mm wafers (100 pcs.)[1]
Gas & chemistry1
Control & software1
Configuration & options2
Vintage & configurations
- 1984Production start[1]
Tegal's 900 Series was first introduced in 1984.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Feed gasesTwo independent feed gases[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 915 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the 915 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 915 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 915 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 915 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 915 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 4, 2026.
Compare with similar tools
View all →
The Tegal 6510 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.
The Tegal 6520 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.
The Tegal 6540 is a high-density plasma etch system used for etching difficult-to-etch materials in MEMS and related semiconductor applications.
The Tegal 6550 is a plasma etch reactor/system for etching non-volatile metal and metal oxide films, with a dual-chamber platform and patented rinse-strip-rinse capability.
