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Thermo Fisher

Scientific FEI NanoLab 1200 AT FIB

200mmThermo Fisher Scientific FEI NanoLab 1200 AT FIB family
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Scientific FEI NanoLab 1200 AT FIB — Inventory photo
Fig. 01Scientific FEI NanoLab 1200 AT FIBInventory photo[1]

Wafer size

200mm

Power

S2 Compliant, 60 Hz[1]

Vacuum

IXL120 Pump[1]

Gas delivery

Carbon deposition precursor[1]

Optics

(2) X-Max Detectors, 80 mm HASKRIS Chiller[1]

What it is

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB is a focused ion beam system with an integrated electron column and supporting inspection, wafer handling, and gas delivery components.[2][3]

How it works

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB includes an Elstar electron column, a Tomahawk ion column, a TLD in-lens detector, an ICE ion detector, SE and BSE imaging modes, and a high-resolution optical microscope.[1][2]

Where it fits in the process flow

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB fits with wafer inspection and wafer navigation functions through its inspection components and semiconductor wafer navigation capability.[1][2]

Applications

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB includes carbon deposition precursor, tungsten deposition precursor, and insulator-enhanced etch precursor capabilities, which support deposition and etch-related work.[1][2]

What do the numbers mean?

Power & electrical2

S2 Compliant, 60 Hz[1]
Accurate?
Power
S2 Compliant, 60 Hz[2]
Accurate?

Vacuum & pumping2

IXL120 Pump[1]
Accurate?
Vacuum
IXL120 Pump[2]
Accurate?

Wafer handling5

Wafer size
High-throughput wafer carrier Kit, (200 mm - 300 mm)[1]
Accurate?
Wafer size
IFAST Semiconductor wafer navigation[1]
Accurate?
Wafer size
200mm[2]
Accurate?
Wafer handling
High-throughput wafer carrier Kit, (200 mm - 300 mm)[1]
Accurate?
Wafer handling
IFAST Semiconductor wafer navigation[2]
Accurate?

Gas & chemistry4

Carbon deposition precursor[1]
Accurate?
Insulator-enhanced etch precursor[1]
Accurate?
Gas delivery
Carbon deposition precursor[2]
Accurate?
Gas delivery
Insulator-enhanced etch precursor[2]
Accurate?

Optics & imaging12

(2) X-Max Detectors, 80 mm HASKRIS Chiller[1]
Accurate?
Elstar Electron column[1]
Accurate?
TLD In-Lens detector[1]
Accurate?
Tomahawk ion column[1]
Accurate?
ICE Ion detector[1]
Accurate?
High-resolution optical microscope[1]
Accurate?
Optics
(2) X-Max Detectors, 80 mm HASKRIS Chiller[2]
Accurate?
Optics
Elstar Electron column[2]
Accurate?
Optics
TLD In-Lens detector[2]
Accurate?
Optics
Tomahawk ion column[2]
Accurate?
Optics
ICE Ion detector[2]
Accurate?
Optics
High-resolution optical microscope[2]
Accurate?

Control & software1

Operating system
Windows XP Manuals[1]
Accurate?

Configuration & options10

Oxford INCA Integration Kit[2]
Accurate?
Integrated plasma cleaner[2]
Accurate?
Modes
SE, BSE[1]
Accurate?
Eucentric stage, 300 mm[2]
Accurate?
Power line conditioner[2]
Accurate?
High-frequency EMI Cancellation system (SC26)[2]
Accurate?
IFAST Pro[2]
Accurate?
INCA Energy 250[2]
Accurate?
Modes SE, BSE[2]
Accurate?
(2) 16
10 LCD Monitors, 24"[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationIXL120 Pump[1]
  • ConfigurationCarbon deposition precursor[1]
  • ConfigurationS2 Compliant, 60 Hz[1]
  • ConfigurationInsulator-enhanced etch precursor[1]
  • VacuumIXL120 Pump[2]
  • PowerS2 Compliant, 60 Hz[2]
  • Gas deliveryCarbon deposition precursor[2]
  • Gas deliveryInsulator-enhanced etch precursor[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of system is the Thermo Fisher Scientific FEI NanoLab 1200 AT FIB?

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB is a focused ion beam system with an integrated electron column and supporting inspection, wafer handling, and gas delivery components.[2][3]

What electron and ion imaging or processing elements are included?

The Thermo Fisher Scientific FEI NanoLab 1200 AT FIB includes an Elstar electron column, a Tomahawk ion column, a TLD in-lens detector, an ICE ion detector, and SE and BSE imaging modes.[1][2]

Not publicly documented

The following facts about the Scientific FEI NanoLab 1200 AT FIB are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI NanoLab 1200 AT FIB are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI NanoLab 1200 AT FIB are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Scientific FEI NanoLab 1200 AT FIB are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Scientific FEI NanoLab 1200 AT FIB are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Scientific FEI NanoLab 1200 AT FIB is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Thermo Fisher Scientific FEI NanoLab 1200 AT FIB family | Waferpedia — waferpedia.comwaferpedia.com
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Last updated Oct 6, 2026.

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