OAI
808-Aligner-Tool-Procedu
The OAI 808 Aligner is a semi-automated, four-camera, optical front- and backside mask aligner. The OAI 808 Aligner delivers ultra-precise alignment accuracy of 1µm to 2µm. The OAI 808 Aligner includes motorized backside focus, motorized auto leveling, and auto gap setting.[1]
What it is
How it works
General reference — not yet source-verifiedMask aligners place a patterned mask in close relation to a coated substrate and expose the substrate through the mask with ultraviolet light to transfer the pattern.
Mask aligners are used in contact, soft contact, proximity, and gap-based exposure modes, with alignment performed to position top-side or backside features before exposure.
Where it fits in the process flow
General reference — not yet source-verifiedMask alignment and exposure occur in the lithography portion of microfabrication before downstream pattern transfer steps such as etching or deposition removal.
What can it run?
Process applications and technology nodes documented for this tool.
- Lithography
What do the numbers mean?
Vacuum & pumping1
- Resolution
- Vacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1]
Optics & imaging7
Performance5
Configuration & options13
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ResolutionVacuum + Hard Contact ≤ 1 µm; Hard Contact ≤ 1.5 µm; Soft Contact ≤ 2.0 µm; Proximity ≥ 3.0 µm[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 808-Aligner-Tool-Procedu are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 808-Aligner-Tool-Procedu are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 808-Aligner-Tool-Procedu are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 808-Aligner-Tool-Procedu are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 808-Aligner-Tool-Procedu are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 808-Aligner-Tool-Procedu is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]cores.research.asu.edu — cores.research.asu.educores.research.asu.edu
Last updated Oct 5, 2026.
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The OAI 808 Aligner is a semi-automated, four-camera, optical front- and backside mask aligner with stated alignment accuracy of 1µm to 2µm.
